| 1 | Trace-Rare-Gas Optical Emission Spectroscopy of Nitrogen Plasma Generated at a Frequency of 13.56 MHz显示文摘Optical emission spectroscopic measurement of trace rare gas is carried out to determinethe density of nitrogen (N) atom, in a nitrogen plasma, as a function of filling pressureand RF power applied. 2% of argon, used as an actinometer, is mixed with nitrogen. In orderto normalize the changes in the excitation cross section and electron energy distribution functionat different operational conditions, the Ar-Ⅰ emission line at 419.83 nm is used, which is of nearlythe same excitation efficiency coefficient as that of the nitrogen emission line at 493.51 nm. It isobserved that the emission intensity of the selected argon and atomic nitrogen lines increases withboth pressure and RF power, as does the nitrogen atomic density. | N.U.REHMAN F.U.KHAN S.NASEER G.MURTAZA S.S.HUSSAIN I.AHMAD M.ZAKAULLAH | 2011 | Plasma Science and Technology2011，13，2： | 0 |
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