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43篇 您的检索式:期刊名="Journal of Electromechanical System"
    题名 作者 年代 出处 被引量
1Fracture strength of polysilicon atstress concentrations显示文摘Bagdahn J Sharpe W N Jadaan O 2003Journal of Micro- electromechanical Systems2003,12,3:1
2Dynamics of MEMS arches of flexible supports 显示文摘ALKHARABSHEH S A YOUNIS M I 2013Journal of Micro- electromechanical Systems2013,22,1:1
3Resonaat Silicon Accelerometers in Bulk Micmmachining Technology an Approach 显示文摘Burrer C Esteve J Lora-Tamayo E 1996Journal of Micro Electromechanical System1996,5,2:1
4Thin film shape memory alloy microactuators显示文摘Krulevitch P Lee AP Ramsey PB 1996Journal of Micro Electromechanical Systems1996,5,:1
5Convective diffusive mass transfer inside complex micro-molds during electrodeposition显示文摘WANG W H LEITH S D SCHWARTZ D T 2002Journal of Micro Electromechanical Systems2002,11,2:1
6Design, Fabrication, and Characterization of a Sub-Microelectromechanieal Resonator with Monolithically Integrated CMOS Readout Circuit显示文摘Jaume Verd Abadal G Teva J 2005Journal of Micro Electromechanical Systems2005,14,3:1
7Design and Fabrication of Microfluidie Devices for Multiphase Mixing and Reaction 显示文摘Losey M W Frebaugh S L 2002Journal of Micro- electromechanical Systems2002,11,:1
8A new technique for measuring the mechanical properties of thin films显示文摘SHARPE W N BIN Y EDWARDS R L 1997Journal of Electromechanical System1997,6,3:1
9A six-wafer combustion system for a silicon micro gas turbine engine 显示文摘Mehra Zhang Xin 2000Journal of Micro Electromechanical Systems2000,9,4:1
10Viscous Damping Model for Laterally Oscillating Microstructures显示文摘 Albert P Pisano and Roger T Howe 1994Journal of Micro Electromechanical Systems1994,3,2:1
11Electrostatic micromechanical actuator with extended range of travel 显示文摘CHAN E K DUTTON R W 2000Journal of Micro- electromechanical Systems2000,9,3:1
12Application of nanoimprint technology in MEMS-based micro direct-methanol fuel cell (μ-DMFC) 显示文摘Zhang Y Lu J Zhou S H 2008Journal of Micro Electromechanical Systems2008,17,4:1
13Waveform Design Methods for Piezo Inkjet Dispensers Based on Measured Meniscus Motion显示文摘Kwon K S 2009Journal of Micro- electromechanical Systems2009,,18:1
14Transient heat transfer and gas flow in a MEMS-based thruster显示文摘ALEXEENKO A A FEDOSOV D A GIMELSHEIN S F 2006Journal of Micro electromechanical Systems2006,15,1:1
15A Simulation Program for the Sensitivity and Linearity of Piezoresistive Pressure Sensors显示文摘LIN L W HUEY C C YEN W L 1999Journal of Micro Electromechanical Systems1999,8,4:1
16Batch mode micro-electro-discharge machining 显示文摘TAKAHATA K GIANCHANDANI Y B 2002Journal of Micro electromechanical Systems2002,11,4:1
17Millimeter-scale Fuel Cell with onboard fuel and passive control system 显示文摘Moghaddam S Pengwang E Lin K Y 2008Journal of Micro Electromechanical Systems2008,17,6:1
18Pull-In study of an electrostatic torsion microactuator显示文摘Ofir Degani 1998Journal of Micro Electromechanical Systems1998,7,4:1
19Microreactor for hydrogen production in micro fuel cell applications 显示文摘Pattekar A V Kothare M V 2004Journal of Micro Electromechanical Systems2004,13,1:1
20A six-wafer combustion system for a silicon micro gas turbine engine 显示文摘Mehra A Zhang X Ayon A A 2000Journal of Micro Electromechanical Systems2000,9,4:1
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