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| 1 | 微针加工技术的最新研究进展显示文摘微针作为一种新型经皮给药器具,在生物医学领域中有广泛的应用需求。结合UV-LIGA加工技术、湿法刻蚀技术、干法刻蚀技术和表面微加工技术等传统微电子机械系统(MEMS)加工技术,以及最近出现的3D打印技术、激光加工技术、拉延光刻技术和热压法等微针的特种加工技术,分析了国内外的微针制备的研究现状,简述了不同类型的微针在经皮给药应用中的优缺点,指出了微针在经皮给药中存在的技术瓶颈和解决方案,最后提出了微针在药物治疗系统、医学检测系统、智能药物的输送系统和传感器系统等方面的应用。 | 王洁 王欢 吴文渊 李以贵 | 2020 | 微纳电子技术2020，57，11： | 0 |
| 2 | Methods for latent image simulations in photolithography with a polychromatic light attenuation equation for fabricating VIAs in 2.5D and 3D advaneed packaging architectures显示文摘As demand accelerates for multifunctional devices with a small footprint and minimal power consumption,2.5D and 3D advanced packaging architectures have emerged as an essential solution that use through-substrate vias(TSVs)as vertical in terconnects.Vertical stacking en ables chip packages with increased functi on ality,enhanced desig n versatility,minimal power loss,reduced footprint and high bandwidth.Unlocking the potential of photolithography for vertical interconnect access(VIA)fabrication requires fast and accurate predictive modeling of diffraction effects and resist film photochemistry.This procedure is especially challenging for broad-spectrum exposure systems that use,for example,Hg bulbs with g-,h-,and i-line UV radiation.In this paper,we present new methods and equations for VIA latent image determination in photolithography that are suitable for broad-spectrum exposure and negate the need for complex and time-consuming in situ metrology.Our technique is accurate,converges quickly on the average modern PC and could be readily integrated into photolithography simulation software.We derive a polychromatic light attenuation equation from the Beer-Lambert law,which can be used in a critical exposure dose model to determine the photochemical reaction state.We in teg rate this equation with an exact scalar diffraction formula to produce a succinct equation comprising a complete coupling between light propagation phenomena and photochemical behavior.We then perform a comparative study between 2D/3D photoresist latent image simulation geometries and directly corresponding experimental data,which demonstrates a highly positive correlation.We anticipate that this technique will be a valuable asset to photolithography,micro-and nano-optical systems and advaneed packaging/system integration with applications in technology domains ranging from space to automotive to the Internet of Things(loT). | Daniel C.Smallwood Paul McCloskey Cian OzMathuna Declan P.Casey James F.Rohan | 2021 | Microsystems & Nanoengineering2021，7，3： | 0 |
| 3 | A Review of Nano/Micro/Milli Needles Fabrications for Biomedical Engineering显示文摘Needles,as some of the most widely used medical devices,have been effectively applied in human disease prevention,diagnosis,treatment,and rehabilitation.Thin 1D needle can easily penetrate cells/organs by generating highly localized stress with their sharp tips to achieve bioliquid sampling,biosensing,drug delivery,surgery,and other such applications.In this review,we provide an overview of multiscale needle fabrication techniques and their biomedical applications.Needles are classified as nanoneedles,microneedles and millineedles based on the needle diameter,and their fabrication techniques are highlighted.Nanoneedles bridge the inside and outside of cells,achieving intracellular electrical recording,biochemical sensing,and drug delivery.Microneedles penetrate the stratum corneum layer to detect biomarkers/bioelectricity in interstitial fluid and deliver drugs through the skin into the human circulatory system.Millineedles,including puncture,syringe,acupuncture and suture needles,are presented.Finally,conclusions and future perspectives for next-generation nano/micro/milli needles are discussed. | Bin Liu Xin Yi Ying Zheng Zhishan Yuan Jingbo Yang Jian Yang Xiao Yu Lelun Jiang Chengyong Wang | 2022 | Chinese Journal of Mechanical Engineering2022，35，3： | 0 |
| 4 | 微针技术在经皮给药系统中应用的研究进展显示文摘微针在研发初期主要用于药物的输送,可以克服传统经皮给药的局限性,是继口服和注射之后的一种给药新途径。介绍了微针的类型及其释药机制,阐述了固体、涂层、空心、溶解、水凝胶5种类型微针的给药方式的优缺点及其在经皮给药领域中应用的最新研究进展。说明了不同的微针类型适用于不同性质的药物输送,当前先进的微针经皮给药系统可以显著提高药物经皮的渗透量,达到良好的治疗效果。此外,还对微针在当前发展中可能存在的问题进行了探讨,并对其在未来的发展前景进行了展望。 | 崔闻宇 王瑾 | 2023 | 微纳电子技术2023，60，2： | 0 |
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